Design and Custom Fabrication of a Smart Temperature Sensor for an Organ-on-a-chip Platform

Conference paper (2018)

Authors

R. Martins Da Ponte Bio-Electronics - EEMCS
Vasiliki Giagka Fraunhofer Institute for Reliability and Microintegration IZM, Bio-Electronics - EEMCS
W.A. Serdijn Bio-Electronics - EEMCS
Research Group
Bio-Electronics (EEMCS) (TU Delft)
Copyright: © 2018 R. Martins Da Ponte, Vasiliki Giagka, W.A. Serdijn
DOI
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https://doi.org/10.1109/BIOCAS.2018.8584834
Organ-on-a-chip Smart temperature sensor IC MEMS co-design Time-mode signal-processing
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Published Date

2018

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Bio-Electronics

Abstract

This paper reports on the design and fabrication of a time-mode signal-processing in situ temperature sensor customized for an organ-on-a-chip (OOC) application. The circuit was fabricated using an in-house integrated circuit (IC) technology that requires only seven lithographic steps and is compatible with MEMS fabrication process. The proposed circuit is developed to provide the first out-of-incubator temperature monitoring of cell cultures on an OOC platform in a monolithic fabrication. Measurement results on wafer reveal a temperature measurement resolution of less than ±0.2 °C (3σ) and a maximum nonlinearity error of less than 0.3% across a temperature range from 25 °C to 100 °C.

Files

Biocas_2018.pdf
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