Design and Custom Fabrication of a Smart Temperature Sensor for an Organ-on-a-chip Platform
Ronaldo Ponte (TU Delft - Bio-Electronics)
Vasiliki Giagka (Fraunhofer Institute for Reliability and Microintegration IZM, TU Delft - Bio-Electronics)
Wouter A. Serdijn (TU Delft - Bio-Electronics)
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Abstract
This paper reports on the design and fabrication of a time-mode signal-processing in situ temperature sensor customized for an organ-on-a-chip (OOC) application. The circuit was fabricated using an in-house integrated circuit (IC) technology that requires only seven lithographic steps and is compatible with MEMS fabrication process. The proposed circuit is developed to provide the first out-of-incubator temperature monitoring of cell cultures on an OOC platform in a monolithic fabrication. Measurement results on wafer reveal a temperature measurement resolution of less than ±0.2 °C (3σ) and a maximum nonlinearity error of less than 0.3% across a temperature range from 25 °C to 100 °C.