Evaporation based micro pump integrated into a scanning force microscope probe
Journal Article
(2008)
Author(s)
FCA Heuck (TU Delft - Micro and Nano Engineering)
T Hug (External organisation)
T Akiyama (External organisation)
PLTM Frederix (External organisation)
Urs STAUFER (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:fe826ac7-b475-4a6c-9244-6596632f5a3b
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Publication Year
2008
Research Group
Micro and Nano Engineering
Bibliographical Note
Niet eerder opgevoerd@en
Volume number
85
Pages (from-to)
1302-1305
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