Print Email Facebook Twitter Fast step-response settling of micro electrostatic actuators operated at low air pressure using input shaping Title Fast step-response settling of micro electrostatic actuators operated at low air pressure using input shaping Author Mol, L. Rocha, L.A. Cretu, E. Wolffenbuttel, R.F. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2009-12-31 Abstract Squeeze-film damping is highly inadequate in low-pressure systems or in systems where air pressure and/or gap dimensions are poorly defined. Input shaping has been used to circumvent the oscillations typically associated with under-damped mass-spring-damper systems and drastically decrease the settling time. The proposed method does not rely on feedback but solely on the system dynamics. The required input signal is derived analytically from the differential equation describing the system. The resulting device response is simulated and experimentally verified on an electrostatically actuated microstructure. Settling occurs even faster than for an equivalent critically damped system. To reference this document use: http://resolver.tudelft.nl/uuid:12768239-418c-4200-afcb-5980ede542d8 DOI https://doi.org/10.1088/0960-1317/19/7/074020 Publisher Institute of Physics ISSN 0960-1317 Source http://iopscience.iop.org/0960-1317/19/7/074020 Source Journal of micromechanics and microengineering, 19 Part of collection Institutional Repository Document type journal article Rights (c)2009 The Authors; Institute of Physics Files PDF Mol.pdf 730.71 KB Close viewer /islandora/object/uuid:12768239-418c-4200-afcb-5980ede542d8/datastream/OBJ/view