The development of a low-stress polysilicon process compatible with standard device processing

Journal article (1996)
Copyright: © 1996 French, P.J.; van Drieenhuizen, B.P.; Poenar, D.; Goosen, J.F.L.; Mallee, R.; Sarro, P.M.; Wolffenbuttel, R.F.
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Published Date

1996

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Source:

Journal of Microelectromechanical Systems, 5 (3)

ISSN:

1057-7157