Flexible High-Sensitivity Strain Sensor Fabricated with Pdms Micro-Channel Array Using Laser Transmission Pyrolysis Technology

Conference paper (2024)

Authors

S. Wang Bio-Electronics - EEMCS
Qihang Zong Southern University of Science and Technology
Huiru Yang Southern University of Science and Technology
Qianming Huang Southern University of Science and Technology
Huaiyu Ye Southern University of Science and Technology
P.J. French Bio-Electronics - EEMCS
Research Group
Bio-Electronics (EEMCS) (TU Delft)
Copyright: © 2024 S. Wang, Qihang Zong, Huiru Yang, Qianming Huang, Huaiyu Ye, P.J. French
DOI: https://doi.org/10.1109/MEMS58180.2024.10439302
More Info
expand_more

Published Date

2024

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Bio-Electronics

Abstract

In recent years, flexible strain sensors based on metal cracks have garnered significant interest for their exceptional sensitivity. However, striking a balance between sensitivity and detection range remains a significant challenge, which often limits its wider application. Herein, we introduce an innovative laser transmission pyrolysis technology to fabricate high-performance flexible strain sensors based on (Au) metal cracks with a microchannel array on the PDMS surface. The fabricated flexible strain sensors exhibit high sensitivity, wide detection range, precise strain resolution, fast response and recovery times, and robust durability. Furthermore, this technology has potential applications in microfluidics, microelectromechanical systems, and optical sensing.

Files

Flexible_High-Sensitivity_Stra... (.pdf)
(.pdf | 1.84 Mb)
- Embargo expired in 22-08-2024