Print Email Facebook Twitter Ultra-thin alumina and silicon nitride MEMS fabricated membranes for the electron multiplication Title Ultra-thin alumina and silicon nitride MEMS fabricated membranes for the electron multiplication Author Prodanovic, V. (TU Delft EKL-Users) Chan, H.W. (TU Delft Electronic Components, Technology and Materials) van der Graaf, H. (TU Delft RST/Neutron and Positron Methods in Materials) Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials) Date 2018 Abstract In this paper we demonstrate the fabrication of large arrays of ultrathin freestanding membranes (tynodes) for application in a timed photon counter (TiPC), a novel photomultiplier for single electron detection. Low pressure chemical vapour deposited silicon nitride (Si x N y ) and atomic layer deposited alumina (Al2O3) with thicknesses down to only 5 nm are employed for the membrane fabrication. Detailed characterization of structural, mechanical and chemical properties of the utilized films is carried out for different process conditions and thicknesses. Furthermore, the performance of the tynodes is investigated in terms of secondary electron emission, a fundamental attribute that determines their applicability in TiPC. Studied features and presented fabrication methods may be of interest for other MEMS application of alumina and silicon nitride as well, in particular where strong ultra-thin membranes are required. Subject atomic layer deposited aluminaLPCVD silicon nitridesecondary electron emissiontimed photon counterultra-thin membranes To reference this document use: http://resolver.tudelft.nl/uuid:4d3f62d7-3fb8-45fd-bea7-cc7b4381d224 DOI https://doi.org/10.1088/1361-6528/aaac66 Embargo date 2021-08-02 ISSN 0957-4484 Source Nanotechnology, 29 (15), 1-11 Bibliographical note Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type journal article Rights © 2018 V. Prodanovic, H.W. Chan, H. van der Graaf, Pasqualina M Sarro Files PDF Prodanovi_2018_Nanotechno ... 155703.pdf 2.57 MB Close viewer /islandora/object/uuid:4d3f62d7-3fb8-45fd-bea7-cc7b4381d224/datastream/OBJ/view