Print Email Facebook Twitter Plasma Etching for Integrated Silicon Sensor Applications Title Plasma Etching for Integrated Silicon Sensor Applications Author Li, Y.X. Contributor Middelhoek, S. (promotor) Faculty Electrical Engineering, Mathematics and Computer Science Date 1995-10-16 Subject Plasma etchingsilicon sensormicromachining To reference this document use: http://resolver.tudelft.nl/uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0 Publisher Delft University Press ISBN 90-407-1177-1 Part of collection Institutional Repository Document type doctoral thesis Rights (c) 1995 Y.X. Li Files PDF emc_li_19951016.PDF 11.53 MB Close viewer /islandora/object/uuid:5030552c-3bbe-4659-b4b4-aac93b7bb8b0/datastream/OBJ/view