Print Email Facebook Twitter Ultrathin complex oxide nanomechanical resonators Title Ultrathin complex oxide nanomechanical resonators Author Davidovikj, D. (TU Delft QN/van der Zant Lab; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) Groenendijk, D.J. (TU Delft QN/Caviglia Lab; Kavli institute of nanoscience Delft) Monteiro, A. M.R.V.L. (Kavli institute of nanoscience Delft) Dijkhoff, A. (Kavli institute of nanoscience Delft; Student TU Delft) Afanasiev, D. (TU Delft QN/Caviglia Lab; Kavli institute of nanoscience Delft) Siskins, M. (TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) van der Zant, H.S.J. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft) Caviglia, A. (TU Delft QN/Caviglia Lab; Kavli institute of nanoscience Delft) Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) Date 2020 Abstract Complex oxide thin films and heterostructures exhibit a variety of electronic phases, often controlled by the mechanical coupling between film and substrate. Recently it has become possible to isolate epitaxially grown single-crystalline layers of these materials, enabling the study of their properties in the absence of interface effects. In this work, we use this technique to create nanomechanical resonators made out of SrTiO3 and SrRuO3. Using laser interferometry, we successfully actuate and measure the motion of the nanodrum resonators. By measuring the temperature-dependent mechanical response of the SrTiO3 resonators, we observe signatures of a structural phase transition, which affects both the strain and mechanical dissipation in the resonators. Here, we demonstrate the feasibility of integrating ultrathin complex oxide membranes for realizing nanoelectromechanical systems on arbitrary substrates and present a novel method of detecting structural phase transitions in these exotic materials. Subject OA-Fund TU Delft To reference this document use: http://resolver.tudelft.nl/uuid:5330474d-ac10-433e-a628-795581b05d66 DOI https://doi.org/10.1038/s42005-020-00433-y ISSN 2399-3650 Source Communications Physics, 3 (1) Part of collection Institutional Repository Document type journal article Rights © 2020 D. Davidovikj, D.J. Groenendijk, A. M.R.V.L. Monteiro, A. Dijkhoff, D. Afanasiev, M. Siskins, H.S.J. van der Zant, A. Caviglia, P.G. Steeneken, More Authors Files PDF s42005_020_00433_y.pdf 1.57 MB Close viewer /islandora/object/uuid:5330474d-ac10-433e-a628-795581b05d66/datastream/OBJ/view