Print Email Facebook Twitter Technology and applications of micromachined silicon adaptive mirrors Title Technology and applications of micromachined silicon adaptive mirrors Author Vdovin, G. Middelhoek, S. Sarro, P.M. Faculty Electrical Engineering, Mathematics and Computer Science Date 1997-08-01 Abstract The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of ?/20 and a range of surface deflection of 10 to 20 ?m with linear frequency response in the range of 50 Hz to 1 kHz, are fabricated on standard PCB substrates. Advanced devices with hundreds of control channels, demanding integration of driver and switching electronics, are currently under development Subject Open Access publication To reference this document use: http://resolver.tudelft.nl/uuid:54c019ba-1440-472a-87c2-e1b445f98f82 DOI https://doi.org/10.1117/1.601334 Publisher Society of Photo-Optical Instrumentation Engineers Source Optical Engineering / Volume 36 / Issue 5 Part of collection Institutional Repository Document type journal article Rights (c) SPIE Files PDF Sarro.pdf 962.53 KB Close viewer /islandora/object/uuid:54c019ba-1440-472a-87c2-e1b445f98f82/datastream/OBJ/view