Reactive Magnetron Sputter Deposition of Superconducting Niobium Titanium Nitride Thin Films with Different Target Sizes

Journal article (2017)

Authors

Cornelis Bos Kavli institute of nanoscience Delft, Student
David Thoen Tera-Hertz Sensing - EEMCS , QN/van der Zant Lab - AS , Kavli institute of nanoscience Delft
E. A.F. Haalebos SRON Netherlands Institute for Space Research
P. M.L. Gimbel Student, Kavli institute of nanoscience Delft
T.M. Klapwijk QN/Klapwijk Lab , Kavli institute of nanoscience Delft
J.J.A. Baselmans Tera-Hertz Sensing - EEMCS , SRON Netherlands Institute for Space Research
A. Endo Tera-Hertz Sensing - EEMCS , Kavli institute of nanoscience Delft, QN/Quantum Nanoscience
Research Group
Tera-Hertz Sensing (EEMCS) (TU Delft)
Copyright: © 2017 Boy Gustaaf Cornelis Bos, David Thoen, E. A.F. Haalebos, P. M.L. Gimbel, T.M. Klapwijk, J.J.A. Baselmans, A. Endo
DOI: https://doi.org/10.1109/TASC.2016.2631939
Reactive sputtering Optimization methods Superconducting thin films Submillimeter wave detectors Superconducting critical temperature Superconducting device fabrication
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Published Date

01-06-2017

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Tera-Hertz Sensing