Bimorph actuators in thick SiO₂ for photonic alignment

Bimorph actuators in thick SiO₂ for photonic alignment

Wu, K. (TU Delft Micro and Nano Engineering)
Peters, T.J. (TU Delft Micro and Nano Engineering)
Tichem, M. (TU Delft Micro and Nano Engineering)
Postma, Ferry (LioniX International BV)
Prak, Albert (LioniX International BV)
Wörhoff, Kerstin (LioniX International BV)
Leinse, Arne (LioniX International BV)

Schröder, Henning (editor)
Chen, Ray T. (editor)

2016

This paper proposes and tests a design of electro-thermal bimorph actuators for alignment of flexible photonic waveguides fabricated in 16 μm thick SiO². The actuators are for use in a novel alignment concept for multi-port photonic integrated circuits (PICs), in which the fine alignment is taken care of by positioning of suspended, mechanically flexible waveguide beams on one or more of the PICs. The design parameters of the bimorph actuator allow to tune both the initial relative position of the waveguide end-facets, and the motion range of the actuators. Bimorph actuators have been fabricated and characterized. The maximum out-of-plane deflection of the bimorph actuator (with 720 μm-long poly-Si) can reach 18:5 μm with 126:42mW, sufficient for the proposed application.

bimorph actuators
out-of-plane deection
poly-Si
short-loop
SiO MEMS

http://resolver.tudelft.nl/uuid:774519b8-97dd-476f-8283-0fecc116ad13

https://doi.org/10.1117/12.2209499

SPIE, Bellingham, WA, USA

978-1-628419887

Optical Interconnects XVI, 9753

Optical Interconnects XVI, 2016-02-15 → 2016-02-17, San Francisco, United States

Proceedings of SPIE, 1605-7422, 9753

Institutional Repository

conference paper

© 2016 K. Wu, T.J. Peters, M. Tichem, Ferry Postma, Albert Prak, Kerstin Wörhoff, Arne Leinse