Print Email Facebook Twitter Review of scaling effects on physical properties and practicalities of cantilever sensors Title Review of scaling effects on physical properties and practicalities of cantilever sensors Author Yang, C. (TU Delft BUS/Quantum Delft) van der Drift, E.W.J.M. (TU Delft Management Support) French, P.J. (TU Delft Bio-Electronics) Date 2022 Abstract Reducing sensor dimension is a good way to increase system sensitivity and response. However the advantages gained must be weighed against other effects which also became significant during the scaling process. In this paper, the scaling effect of cantilever sensors from micrometre to nanometre regimes is reviewed. Changes in the physical properties such as Q-factor, Young's modulus, noise and nonlinear deflections, as well as effects on practical sensor applications such as sensor response and sensor readouts, are presented. Since cantilever is an elemental transducer and device building block, its scaling effects can be further extrapolated to other sensing systems and applications. Subject cantilevereffectsphysicalpracticalitiespropertiesscaling To reference this document use: http://resolver.tudelft.nl/uuid:7c51909f-9962-42b2-a693-00a59fcc3fb6 DOI https://doi.org/10.1088/1361-6439/ac8559 Embargo date 2023-07-01 ISSN 0960-1317 Source Journal of Micromechanics and Microengineering, 32 (10) Bibliographical note Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type review Rights © 2022 C. Yang, E.W.J.M. van der Drift, P.J. French Files PDF Yang_2022_J._Micromech._M ... 103002.pdf 1.12 MB Close viewer /islandora/object/uuid:7c51909f-9962-42b2-a693-00a59fcc3fb6/datastream/OBJ/view