Print Email Facebook Twitter Saddle-point construction in the design of lithographic objectives, part 2: Application Title Saddle-point construction in the design of lithographic objectives, part 2: Application Author Marinescu, O. Bociort, F. Faculty Applied Sciences Department Optics Research Group Date 2008-09-30 Subject saddle pointlithographyoptimizationoptical system designEUVDUV To reference this document use: http://resolver.tudelft.nl/uuid:7cd0b27c-f95b-47c3-969b-36c4b7affa0d Publisher SPIE ISSN 0091-3286 Source Optical engineering, 47.2008 nr. 9 Part of collection Institutional Repository Document type journal article Rights (c)2008 Marinescu, O., Bociort, F. Files PDF 20082.2.Saddle.pdf 367.66 KB Close viewer /islandora/object/uuid:7cd0b27c-f95b-47c3-969b-36c4b7affa0d/datastream/OBJ/view