Airgap-based MEMS optical filters

For the ultraviolet-visible spectrum

Doctoral thesis (2016)

Authors

M. Ghaderi Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Copyright: © 2016 M. Ghaderi
DOI: https://doi.org/10.4233/uuid:7db0bc2e-9a7d-46fe-8108-2a63efcd3908
More Info
expand_more

Published Date

20-06-2016

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Files

Ghaderi_thesis_FR.pdf
(.pdf | 6.13 Mb)
- Embargo expired in 20-06-2017