Airgap-based MEMS optical filters

Title

Airgap-based MEMS optical filters: For the ultraviolet-visible spectrum

Author

Ghaderi, M. (TU Delft Electronic Instrumentation)

Contributor

Theuwissen, A.J.P.A.M. (promotor)
Wolffenbuttel, R.F. (promotor)

Degree granting institution

Delft University of Technology

Date

2016-06-20

Subject

Optical filter
CMOS-compatible
silicon-based
Residual stress
air-gap optical filter

To reference this document use:

https://doi.org/10.4233/uuid:7db0bc2e-9a7d-46fe-8108-2a63efcd3908

ISBN

978-94-028-0232-0

Embargo date

2017-06-20

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

© 2016 M. Ghaderi