Optical and structural characterization of Tm&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt;, TmN, and TmO&lt;sub&gt;x&lt;/sub&gt;N&lt;sub&gt;y&lt;/sub&gt; thin films grown by direct-current reactive magnetron sputtering

Meeuwissen, A.A.; Bizinoto Ferreira Bosco, G.; van der Kolk, E.

doi:10.1016/j.tsf.2020.138450

Optical and structural characterization of Tm₂O₃, TmN, and TmO_xN_y thin films grown by direct-current reactive magnetron sputtering

Title

Optical and structural characterization of Tm₂O₃, TmN, and TmO_xN_y thin films grown by direct-current reactive magnetron sputtering

Author

Meeuwissen, A.A. (TU Delft ImPhys/Afdelingsbureau; TU Delft Medezeggenschapsondersteuning)
Bizinoto Ferreira Bosco, G. (TU Delft RST/Luminescence Materials)
van der Kolk, E. (TU Delft RST/Luminescence Materials)

Date

2021

Abstract

This paper reports the fabrication and characterization of several thulium oxide and nitride thin films grown by reactive magnetron direct-current sputtering. Hysteresis curves of the Tm emission spectra of the sputtering plasma versus the flow of N₂ or O₂ around the Tm-metal target were monitored. Emission spectra of atomic transition lines in the region between 370 and 420 nm were identified to be of neutral thulium. The plasma emission was compared to the hysteresis curves generated by monitoring the sputter rate and target voltage. The nitride films' composition and optical properties were determined by X-Ray Diffraction, and optical transmission spectroscopy. The composition of the oxide films was determined by energy dispersive X-ray spectroscopy. The films are initially amorphous but crystallize after thermal treatment at 800°C. The optical bandgap values obtained using the Tauc method are consistent with what has been previously reported for both Tm₂O₃ and TmN prepared by other methods.

Subject

Reactive magnetron direct-current sputtering
Thulium mononitride
Thulium oxynitrides
Thulium sesquioxide

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http://resolver.tudelft.nl/uuid:7de9ee0d-c830-485a-bebe-70798024553f

DOI

https://doi.org/10.1016/j.tsf.2020.138450

ISSN

0040-6090

Source

Thin Solid Films, 717

Part of collection

Institutional Repository