Print Email Facebook Twitter Linear variable optical filter-based ultraviolet microspectrometer Title Linear variable optical filter-based ultraviolet microspectrometer Author Emadi, A. Wu, H. De Graaf, G. Enoksson, P. Higino Correia, J. Wolffenbuttel, R. Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics Date 2012-06-22 Abstract An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm. To reference this document use: http://resolver.tudelft.nl/uuid:8a922380-2358-4c0f-8828-2f2328ca4883 DOI https://doi.org/10.1364/AO.51.004308 Publisher Optical Society of America ISSN 1559-128X Source http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-19-4308 Source Applied Optics, 51 (19), 2012 Part of collection Institutional Repository Document type journal article Rights © 2012 Optical Society of America Files PDF Emadi_2012.pdf 1.29 MB Close viewer /islandora/object/uuid:8a922380-2358-4c0f-8828-2f2328ca4883/datastream/OBJ/view