Print Email Facebook Twitter Plasma planarization for sensor applications Title Plasma planarization for sensor applications Author Li, Y.X. French, P.J. Wolffenbuttel, R.F. Date 1995 To reference this document use: http://resolver.tudelft.nl/uuid:9cccf1f6-9c60-4d2e-a879-2862111cb29e Publisher IEEE ISSN 1057-7157 Source Journal of Microelectromechanical Systems, 4 (3) Part of collection Institutional Repository Document type journal article Rights (c) 1995 Li, Y.X.; French, P.J.; Wolffenbuttel, R.F. Files PDF ieee_li_1995a.pdf 876.86 KB Close viewer /islandora/object/uuid:9cccf1f6-9c60-4d2e-a879-2862111cb29e/datastream/OBJ/view