Print Email Facebook Twitter Structuring Interdigitated Back Contact Solar Cells Using the Enhanced Oxidation Characteristics Under Laser-Doped Back Surface Field Regions Title Structuring Interdigitated Back Contact Solar Cells Using the Enhanced Oxidation Characteristics Under Laser-Doped Back Surface Field Regions Author Kuruganti, V.V. (International Solar Energy Research Center (ISC)) Isabella, O. (TU Delft Photovoltaic Materials and Devices) Mihailetchi, Valentin D. (International Solar Energy Research Center (ISC)) Date 2024 Abstract Interdigitated back contact (IBC) architecture can yield among the highest silicon wafer-based solar cell conversion efficiencies. Since both polarities are realized on the rear side, there is a definite need for a patterning step. Some of the common patterning techniques involve photolithography, inkjet patterning, and laser ablation. This work introduces a novel patterning technique for structuring the rear side of IBC solar cells using the enhanced oxidation characteristics under the locally laser-doped n++ back surface field (BSF) regions with high-phosphorous surface concentrations. Phosphosilicate glass layers deposited via POCl3 diffusion serve as a precursor layer for the formation of local heavily laser-doped n++ BSF regions. The laser-doped n++ BSF regions exhibit a 2.6-fold increase in oxide thickness compared to the nonlaser-doped n+ BSF regions after undergoing high-temperature wet thermal oxidation. The utilization of oxide thickness selectivity under laser-doped and nonlaser-doped regions serves two purposes in the context of the IBC solar cell, first patterning rear side and second acting as a masking layer for the subsequent boron diffusion. Proof-of-concept solar cells are fabricated using this novel patterning technique with a mean conversion efficiency of 20.41%. Subject interdigitated back contact solar cellslaser dopingpatterning techniquesSiO as diffusion barriers To reference this document use: http://resolver.tudelft.nl/uuid:b35ef96d-d772-49ad-87aa-d5b6d0e2337b DOI https://doi.org/10.1002/pssa.202300820 ISSN 1862-6300 Source Physica Status Solidi. A: Applications and Materials Science (online), 221 (5) Part of collection Institutional Repository Document type journal article Rights © 2024 V.V. Kuruganti, O. Isabella, Valentin D. Mihailetchi Files PDF Physica_Status_Solidi_a_2 ... hanced.pdf 1.09 MB Close viewer /islandora/object/uuid:b35ef96d-d772-49ad-87aa-d5b6d0e2337b/datastream/OBJ/view