Title
Tuning dynamics and dissipation dilution in 2D material resonators by MEMS-induced tension
Author
Wopereis, Michiel (TU Delft Mechanical, Maritime and Materials Engineering; TU Delft Precision and Microsystems Engineering; TU Delft Dynamics of Micro and Nano Systems)
Contributor
Steeneken, P.G. (mentor) 
Verbiest, G.J. (mentor)
Alijani, F. (mentor)
Staufer, U. (graduation committee)
Vollebregt, S. (graduation committee)
Degree granting institution
Delft University of Technology
Programme
Mechanical Engineering
Date
2024-01-11
Abstract
Nanomechanical resonators made of two-dimensional (2D) materials are the subject of intensive research due to their remarkable properties, allowing them to operate at high frequencies with high sensitivity. However, dissipation losses and manufacturing issues have prevented them from reaching their full potential. This thesis aims to overcome these challenges by dry-transferring 2D materials onto a MEMS and clamping them using electron beam-induced deposition. By in-plane straining the membranes using MEMS, the tensile energy is increased, thereby diluting intrinsic losses. This approach increased the Q-factor of 2D material resonators by 91% and allowed measuring forces down to sub-piconewtons, outperforming commercially available silicon-based force sensors.
Subject
Dissipation dilution
Quality factor
Tunable resonators
2D materials
MEMS
NEMS
force sensors
To reference this document use:
http://resolver.tudelft.nl/uuid:b8088705-62f6-450c-b23e-99e41870a763
Embargo date
2025-01-31
Part of collection
Student theses
Document type
master thesis
Rights
© 2024 Michiel Wopereis