Title
An Ultrasonically Powered System Using an AlN PMUT Receiver for Delivering Instantaneous mW-Range DC Power to Biomedical Implants
Author
Rashidi, A. (TU Delft Bio-Electronics) 
Saccher, M. (TU Delft Electronic Components, Technology and Materials)
Karuthedath, Cyril Baby (VTT Technical Research Center of Finland)
Sebastian, Abhilash Thanniyil (VTT Technical Research Center of Finland)
Savoia, Alessandro Stuart (University of Roma Tre)
Lavigne, Frederik (Cyient)
Stubbe, Frederic (Cyient)
Dekker, R. (TU Delft Electronic Components, Technology and Materials; Philips)
Giagka, Vasiliki (TU Delft Bio-Electronics; Fraunhofer Institute for Reliability and Microintegration IZM)
Date
2023
Abstract
Aluminum Nitride (AlN) Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) are gaining interest for biomedical implant power due to biocompatibility and lowtemperature processing. However, due to the low piezoelectric coefficient of AlN PMUTs, storage capacitors are often used to accumulate ultrasonic power transferred over an extended time. The accumulated energy is then used to power a DC load, which leads to a long start-up time, and insufficient duty cycle for some applications. We present an ultrasonically powered system for biomedical implants capable of delivering mW-range instantaneous power to DC loads, without pre-storing it. The system features a 25 mm2 AlN PMUT, an inductive matching network, and an application-specific power management integrated circuit(ASIC). For an acoustic intensity of 360 mW/cm2 at the surface of the PMUT, an open-circuit voltage of 1.11 V and an aperture efficiency of 30.5 % are measured. Furthermore, by connecting a series-matching inductor to the PMUT, the highest-reported power delivered to the load (PDL) of 6.4 mW is measured over an optimal load of 7.6 Ω. Finally, together with the ASIC and at the intensity of 108 mW/cm2, our system delivers 1.04 mW DC power to a 3.3 kΩ load, which is over two orders of magnitude higher than the previously reported average DC power for AlN PMUTs.
Subject
ultrasonic powering
AlN PMUT
matching network
power management
implants
To reference this document use:
http://resolver.tudelft.nl/uuid:cee547a9-ce7d-4646-bf23-d664e0b19eda
DOI
https://doi.org/10.1109/IUS51837.2023.10306557
Publisher
IEEE, Piscataway
Embargo date
2024-05-07
ISBN
979-8-3503-4646-6
Source
Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS)
Event
2023 IEEE International Ultrasonics Symposium (IUS), 2023-09-03 → 2023-09-08, Montreal, Canada
Bibliographical note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Part of collection
Institutional Repository
Document type
conference paper
Rights
© 2023 A. Rashidi, M. Saccher, Cyril Baby Karuthedath, Abhilash Thanniyil Sebastian, Alessandro Stuart Savoia, Frederik Lavigne, Frederic Stubbe, R. Dekker, Vasiliki Giagka