Title
Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing
Author
Wang, S. (TU Delft Bio-Electronics; Southern University of Science and Technology)
Zong, Qihang (Southern University of Science and Technology)
Yang, Huiru (Southern University of Science and Technology)
Tan, C. (TU Delft Electronic Components, Technology and Materials; Southern University of Science and Technology) 
Huang, Qianming (Southern University of Science and Technology)
Liu, X. (TU Delft Electronic Components, Technology and Materials; Southern University of Science and Technology)
Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials)
French, P.J. (TU Delft Bio-Electronics)
Ye, H. (TU Delft Electronic Components, Technology and Materials; Southern University of Science and Technology)
Date
2023
Abstract
The fabrication of flexible pressure sensors with low cost, high scalability, and easy fabrication is an essential driving force in developing flexible electronics, especially for high-performance sensors that require precise surface microstructures. However, optimizing complex fabrication processes and expensive microfabrication methods remains a significant challenge. In this study, we introduce a laser pyrolysis direct writing technology that enables rapid and efficient fabrication of high-performance flexible pressure sensors with a micro-truncated pyramid array. The pressure sensor demonstrates exceptional sensitivities, with the values of 3132.0, 322.5, and 27.8 kPa-1 in the pressure ranges of 0-0.5, 0.5-3.5, and 3.5-10 kPa, respectively. Furthermore, the sensor exhibits rapid response times (loading: 22 ms, unloading: 18 ms) and exceptional reliability, enduring over 3000 pressure loading and unloading cycles. Moreover, the pressure sensor can be easily integrated into a sensor array for spatial pressure distribution detection. The laser pyrolysis direct writing technology introduced in this study presents a highly efficient and promising approach to designing and fabricating high-performance flexible pressure sensors utilizing micro-structured polymer substrates.
Subject
continuous laser pyrolysis
flexible pressure sensor
laser direct writing
micro-truncated pyramid
PDMS
UV laser
To reference this document use:
http://resolver.tudelft.nl/uuid:e0c7f043-631e-4add-af40-34877c89396b
DOI
https://doi.org/10.1021/acsami.3c04290
ISSN
1944-8244
Source
ACS applied materials & interfaces, 15 (34), 41055-41066
Part of collection
Institutional Repository
Document type
journal article
Rights
© 2023 S. Wang, Qihang Zong, Huiru Yang, C. Tan, Qianming Huang, X. Liu, Kouchi Zhang, P.J. French, H. Ye