In-package MEMS-based thermal actuators for micro-assembly

Title

In-package MEMS-based thermal actuators for micro-assembly

Author

Henneken, V.A.
Tichem, M.
Sarro, P.M.

Faculty

Mechanical Maritime and Materials Engineering

Date

2006

To reference this document use:

http://resolver.tudelft.nl/uuid:30979ef8-2e86-4801-987a-de1ff8dc9da9

Publisher

IOP

ISSN

0960-1317

Source

Journal of Micromechanics and Microengineering, 16 (6)

Part of collection

Institutional Repository

Document type

journal article

Rights

(c) 2006 Henneken, V.A.; Tichem, M.; Sarro, P.M.