Title
Flexible High-Sensitivity Strain Sensor Fabricated with Pdms Micro-Channel Array Using Laser Transmission Pyrolysis Technology
Author
Wang, S. (TU Delft Bio-Electronics)
Zong, Qihang (Southern University of Science and Technology)
Yang, Huiru (Southern University of Science and Technology)
Huang, Qianming (Southern University of Science and Technology)
Ye, Huaiyu (Southern University of Science and Technology)
French, P.J. (TU Delft Bio-Electronics)
Date
2024
Abstract
In recent years, flexible strain sensors based on metal cracks have garnered significant interest for their exceptional sensitivity. However, striking a balance between sensitivity and detection range remains a significant challenge, which often limits its wider application. Herein, we introduce an innovative laser transmission pyrolysis technology to fabricate high-performance flexible strain sensors based on (Au) metal cracks with a microchannel array on the PDMS surface. The fabricated flexible strain sensors exhibit high sensitivity, wide detection range, precise strain resolution, fast response and recovery times, and robust durability. Furthermore, this technology has potential applications in microfluidics, microelectromechanical systems, and optical sensing.
Subject
Stretchable strain sensor
Metal film
UV laser
Laser transmission pyrolysis
PDMS pattering
To reference this document use:
http://resolver.tudelft.nl/uuid:474ccbb7-d086-471e-a54b-bc9fa9c91444
DOI
https://doi.org/10.1109/MEMS58180.2024.10439302
Publisher
IEEE, Danvers
Embargo date
2024-08-22
ISBN
979-8-3503-5792-9
Source
Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Event
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), 2024-01-21 → 2024-01-25, Austin, United States
Bibliographical note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Part of collection
Institutional Repository
Document type
conference paper
Rights
© 2024 S. Wang, Qihang Zong, Huiru Yang, Qianming Huang, Huaiyu Ye, P.J. French