Homogeneous Nucleation of Silicon

Title

Homogeneous Nucleation of Silicon

Author

Kruis, F.E.
Schoonman, J.
Scarlett, B.

Date

1994

Subject

chlorinated silanes aerosol vapor nitride system growth

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http://resolver.tudelft.nl/uuid:64a4e21a-9bb6-46e6-9e5b-27a295587cd3

ISSN

0021-8502

Source

Journal of Aerosol Science 25(7), 1291-1304. (1994)

Part of collection

Institutional Repository

Document type

journal article