Design of a Readout Scheme for a MEMS Microphone

Title

Design of a Readout Scheme for a MEMS Microphone

 Author

Cheng, A.

Contributor

Van Veldhoven, R. (mentor)
Makinwa, K.A.A. (mentor)

Faculty

Electrical Engineering, Mathematics and Computer Science

 Department

Microelectronics & Computer Engineering

 Date

2009-12-23

 Abstract

This design mainly proposes a readout scheme for MEMS microphone with positive feedback to decrease the parasitic capacitance. It is designed in CMOS014 technology with a supply voltage of 3.3 V. The proposed architecture can increase the microphone’s sensitivity with a comparatively low bias voltage. It enables the microphone to achieve high sensitivity even if it is loaded by an amplifier with large input capacitance. In the mean time, the SNR and THD are not affected much. The Spectre simulation shows that the system can achieve 61 dB SNR (A-weighted), 0.5% THD (1Pa sound pressure) and 1 mW power consumption. Several traditional readout schemes for MEMS microphone are also discussed and compared. The scheme which is based on amplitude modulation is tested and measured on PCB level.

 Subject

MEMS Microphone

 To reference this document use:

http://resolver.tudelft.nl/uuid:6e23606d-c5a6-4635-8f8d-ea3b2b630763

 Embargo date

2011-01-08

 Part of collection

Student theses

 Document type

master thesis

 Rights

(c) 2009 Cheng, A.
Files
PDF Thesis-AmengCheng.pdf 1.24 MB
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