Ultra-thin corrugated metamaterial film as large-area transmission dynode

Ultra-thin corrugated metamaterial film as large-area transmission dynode

Chan, H.W. (TU Delft Electronic Components, Technology and Materials; Science Park 105)
Prodanovic, V. (TU Delft EKL-Users; Science Park 105)
Theulings, A.M.M.G. (TU Delft RST/Neutron and Positron Methods in Materials)
ten Bruggencate, T. (Student TU Delft)
Hagen, C.W. (TU Delft ImPhys/Microscopy Instrumentation & Techniques)
Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials)
van der Graaf, H. (TU Delft ImPhys/Microscopy Instrumentation & Techniques; Science Park 105)

2022

Large-area transmission dynodes were fabricated by depositing an ultra-thin continuous film on a silicon wafer with a 3-dimensional pattern. After removing the silicon, a corrugated membrane with enhanced mechanical properties was formed. Mechanical metamaterials, such as this corrugated membrane, are engineered to improve its strength and robustness, which allows it to span a larger surface in comparison to flat membranes while the film thickness remains constant. The ultra-thin film consists of three layers (Al₂O₃/TiN/Al₂O₃) and is deposited by atomic layer deposition (ALD). The encapsulated TiN layer provides in-plane conductivity, which is needed to sustain secondary electron emission. Two types of corrugated membranes were fabricated: a hexagonal honeycomb and an octagonal pattern. The latter was designed to match the square pitch of a CMOS pixel chip. The transmission secondary electron yield was determined with a collector-based method using a scanning electron microscope. The highest transmission electron yield was measured on a membrane with an octagonal pattern. A yield of 2.15 was achieved for 3.15 keV incident electrons for an Al₂O₃/TiN/Al₂O₃ tri-layer film with layer thicknesses of 10/5/15 nm. The variation in yield across the surface of the corrugated membrane was determined by constructing a yield map. The active surface for transmission secondary electron emission is near 100%, i.e. a primary electron generates transmission secondary electrons regardless of the point of impact on the corrugated membrane.

Avalanche-induced secondary effects
Electron multipliers (vacuum)
Secondary electron emitters and dynodes and their production

http://resolver.tudelft.nl/uuid:7906185b-e4c8-4d38-8ef0-3f93ea1ca514

https://doi.org/10.1088/1748-0221/17/09/P09027

2023-03-27

1748-0221

Journal of Instrumentation, 17 (9)

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Institutional Repository

journal article

© 2022 H.W. Chan, V. Prodanovic, A.M.M.G. Theulings, T. ten Bruggencate, C.W. Hagen, Pasqualina M Sarro, H. van der Graaf