Print Email Facebook Twitter Multi-Physics Driven Electromigration Study: Multi-Scale Modeling and Experiment Title Multi-Physics Driven Electromigration Study: Multi-Scale Modeling and Experiment Author Cui, Z. (TU Delft Electronic Components, Technology and Materials) Contributor Zhang, Kouchi (promotor) Fan, x.j. (promotor) Vollebregt, S. (copromotor) Degree granting institution Delft University of Technology Date 2021-12-20 Abstract This dissertation presents a comprehensive and integrated study, including theory development, numerical simulation and experiment, for multi-physics driven electromigration in microelectronics. Multi-scale methodologies from atomistic modeling to continuum theory-based simulation have been developed. Moreover, extensive experimental testing, from testing wafer/die design and fabrication, sample preparation and process, to the measurement setup and characterization, has been conducted. The dissertation also provides synergetic and cohesive analysis between simulation and experiment. The simulation predictions and results have been well validated by experimental data. Subject Electromigration SimulationMultiphysicsMultiscale, Accelerated MeasurementStress-MigrationSelf-DiffusionThermomigrationMolecular Dynamic SimulationFinite Element Simulation To reference this document use: https://doi.org/10.4233/uuid:839e79d1-ea4b-4440-9077-d6fb2df4c086 Embargo date 2022-04-30 Part of collection Institutional Repository Document type doctoral thesis Rights © 2021 Z. Cui Files PDF PhD_dissertation_Zhen_Cui.pdf 11.61 MB Close viewer /islandora/object/uuid:839e79d1-ea4b-4440-9077-d6fb2df4c086/datastream/OBJ/view