Print Email Facebook Twitter Silicon carbide reinforced vertically aligned carbon nanotube composite for harsh environment mems Title Silicon carbide reinforced vertically aligned carbon nanotube composite for harsh environment mems Author Mo, J. (TU Delft Electronic Components, Technology and Materials) Shankar, S. (TU Delft Support EKL) Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials) Vollebregt, S. (TU Delft Electronic Components, Technology and Materials) Date 2023 Abstract Fabricating high-aspect-ratio (HAR) structures with silicon carbide (SiC) is a challenging task. This paper presents a silicon carbide (SiC) reinforced vertically aligned carbon nanotubes (VACNT) composite as a promising candidate to fabricate HAR MEMS devices for harsh environment applications. The use of a VACNT array allows the fast realization of HAR structures as a template for MEMS fabrication. The template can later be easily filled by amorphous-SiC due to the porous nature of the VACNT forest. The SiC-CNT nanocomposite has electrical properties dominated by VACNT arrays and mechanical stability dominated by the a-SiC. Based on this concept, a thermal actuator is fabricated and proven to function up to 450°C for the first time. Subject SiC-CNT compositeHAR structuresharsh environmentthermal actuator To reference this document use: http://resolver.tudelft.nl/uuid:8447952c-7e7c-4339-b791-f74783d9d29d DOI https://doi.org/10.1109/MEMS49605.2023.10052162 Publisher IEEE, Danvers Embargo date 2023-09-01 ISBN 978-1-6654-9309-3 Source Proceedings of the 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Event 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023-01-15 → 2023-01-19, Munich, Germany Bibliographical note Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type conference paper Rights © 2023 J. Mo, S. Shankar, Kouchi Zhang, S. Vollebregt Files PDF Silicon_Carbide_Reinforce ... t_Mems.pdf 2.53 MB Close viewer /islandora/object/uuid:8447952c-7e7c-4339-b791-f74783d9d29d/datastream/OBJ/view