Print Email Facebook Twitter Transfer-free graphene-based differential pressure sensor Title Transfer-free graphene-based differential pressure sensor Author Ramesha, Raghutham (Student TU Delft) Vollebregt, S. (TU Delft Electronic Components, Technology and Materials) Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials) Date 2019 Abstract Graphene is an attractive material to be used for pressure sensors due to its thinness, electrical conductivity, and potential high gauge factor. One of the issues with processing graphene is the scalability, which is largely limited by the transfer process that is required for graphene deposited by chemical vapour deposition (CVD). In this work we employed a novel, transfer-free bulk-micromachining approach to realize graphene-based differential pressure sensors. The devices were successfully fabricated, and the samples were examined under Raman Spectroscopy, and electrically characterized. Further, pressure dependent measurements were performed for a dynamic range of 0 to 80 kPa of differential pressure and the corresponding change in resistance of the membrane was measured. The fabricated device has a sensitivity of 0.077 Ω/kPa and a gauge factor of 2.48. Subject Bulk micromachiningDifferential pressure sensorGraphenePiezo resistanceRaman spectroscopy To reference this document use: http://resolver.tudelft.nl/uuid:875a3f5c-e567-41ac-ae03-68ef7531ce62 DOI https://doi.org/10.1109/NMDC47361.2019.9084006 Publisher IEEE Embargo date 2022-11-30 ISBN 9781728126371 Source 2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019 Event 14th IEEE Nanotechnology Materials and Devices Conference, NMDC 2019, 2019-10-27 → 2019-10-30, Stockholm, Sweden Series 2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019 Bibliographical note Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type conference paper Rights © 2019 Raghutham Ramesha, S. Vollebregt, Pasqualina M Sarro Files PDF Transfer_free_Graphene_ba ... Sensor.pdf 697.49 KB Close viewer /islandora/object/uuid:875a3f5c-e567-41ac-ae03-68ef7531ce62/datastream/OBJ/view