Design, Production and Characterisation of an LPCVD-Based Poly-Silicon Carbide Pressure Sensor for Extreme Environments

Abstract

Sensors are extremely valuable to this world. Without sensors, we would not be able to live as we do in this data-driven environment. Therefore, finding new ways to measure the matter around us is a continuous process. In this work, an addition to the new sensors is attempted, using materials that can withstand the most extreme circumstances. This work describes the process of designing, simulating, producing, measuring and validating a pressure sensor based on LPCVD Silicon Carbide.
The created sensor should be modular and back-end-of-line compatible. In addition, the sensor should measure pressures from 80Pa up to 1MPa at temperatures from room temperature to 600°C. Because of a favourable reaction to high temperatures, a capacitive sensor type that uses a sealed membrane for absolute pressure measurements is chosen.
Due to the large pressure range, the design has been split into three distinct parts, each with its specialised pressure range. A low-range for 80Pa to 100kPa, a mid-range sensor for 100kPa to 300kPa and a high-range sensor for 300kPa to 1MPa. To compensate for the nonlinearity in the device, two approaches are taken. One method splits the bottom electrodes, generating a more linear output with the correct division. This approach is used for low-and-mid-pressure devices. The other approach uses touch mode to decrease nonlinearity. After the membrane touches the bottom contact, a linear range is found. This approach is taken for the high-pressure device.
A flowchart has been developed based on the necessary layers to create the sensors. Using this flowchart, masks have been designed. During production, the process was adjusted, as delamination of the dielectric layer was observed. In addition, because of difficulty with sealing, the membrane is thicker than the original design.
During production, buckling of the membranes was observed. This causes the sensors to behave differently compared to the simulations. One effect the buckling may have caused is the reaction to temperature. This is opposite to the simulations. In addition, subjecting the sensors to a vacuum also causes behaviour opposite to what was intended. When high pressure is applied, the sensors do work as intended. Due to the design alterations and buckling effect, the sensors are less sensitive to pressure than intended. The best sensor has a sensitivity of 0.025 f F/100Pa compared to the designed 0.3 f F/100Pa. However, the output of the sensor is linear without needing the designed compensation techniques.