Photoresist coating methods for the integration of novel 3-D RF microstructures

Title

Photoresist coating methods for the integration of novel 3-D RF microstructures

Author

Boellaard, E.
Burghartz, J.N.
Sarro, P.M.

Faculty

Electrical Engineering, Mathematics and Computer Science

Date

2004

To reference this document use:

http://resolver.tudelft.nl/uuid:bd92c279-7853-47d7-8ab3-06dc62c50ae3

Publisher

IEEE

ISSN

1057-7157

Source

Journal of Microelectromechanical Systems, 13 (3)

Part of collection

Institutional Repository

Document type

journal article

Rights

(c) 2004 Nga Phuong Pham; Boellaard, E.; Burghartz, J.N.; Sarro, P.M.