Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask

Journal article (2018)

Authors

A.P. Konijnenberg ImPhys/Optics - AS
Xingyuan Lu Soochow University
Leixin Liu Soochow University
W.M.J.M. Coene ImPhys/Optics - AS , ASML
C.L. Zhao Soochow University
Paul Urbach ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
Copyright: © 2018 A.P. Konijnenberg, Xingyuan Lu, Leixin Liu, W.M.J.M. Coene, C.L. Zhao, Paul Urbach
DOI: https://doi.org/10.1364/OE.26.009332
More Info
expand_more

Published Date

2018

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics

Abstract

A novel non-iterative phase retrieval method is proposed and demonstrated with a
proof-of-principle experiment. The method uses a fixed specially designed mask and through-focus intensity measurements. It is demonstrated that this method is robust to spatial partial coherence in the illumination, making it suitable for coherent diffractive imaging using spatially partially coherent light, as well as for coherence characterization.

Files

Oe_26_7_9332.pdf
(.pdf | 3.72 Mb)