Partially coherent light is essential in lithography systems, where it improves illumination homogenization, enhances resolution, and mitigates speckle noise, playing a key role in advanced imaging applications. However, efficiently generating and computing partially coherent beams (PCBs) remains a challenge, particularly in high-precision lithography where computational efficiency is critical. Here, we introduce a novel modal-superposition method for PCB synthesis, termed “few-mode superposition” and demonstrate its effectiveness in achieving PCBs with higher precision and efficiency. The method requires significantly fewer modes compared to conventional techniques while maintaining high accuracy in intensity and coherence. We apply the few-mode superposition method to the efficient generation of partially coherent light sources and computational lithography, showcasing its ability to rapidly produce PCBs with nonconventional cross-spectral density functions. This facilitates fast lithography simulations and other applications involving partially coherent light. Our approach significantly accelerates both the generation and calculation of PCBs and holds promise for integration with on-chip laser sources, as well as for high-energy laser generation and lithographic mask design.

We propose and experimentally demonstrate a noniterative diffractive imaging method for reconstructing the complex-valued transmission function of an object illuminated by spatially partially coherent light from the far-field diffraction pattern. Our method is based on a pinhole array mask, which is specially designed such that the correlation function in the mask plane can be obtained directly by inverse Fourier transforming the diffraction pattern. Compared to the traditional iterative diffractive imaging methods using spatially partially coherent illumination, our method is noniterative and robust to the degradation of the spatial coherence of the illumination. In addition to diffractive imaging, the proposed method can also be applied to spatial coherence property characterization, e.g., free-space optical communication and optical coherence singularity measurement.

In the theory of partial coherence, coherence singularities can occur in the spectral degree of coherence (SDOC): in case the fields at two different points are completely uncorrelated, the phase of the SDOC is undefined. For a partially coherent vortex beam, the detection of coherence singularities is linked to the measurement of topological charge, whose magnitude equals the number of ring dislocations in its far field amplitude. However, the phase distribution of coherence singularities is rarely mentioned in the literature and the amplitude distribution can hardly reflect the sign of topological charge. In this letter, we present a phase-analysis method for measuring the coherence singularities by introducing a movable perturbation at a certain point in an illumination window of a finite size. Using the proposed method, we measure experimentally the coherence singularities of a partially coherent vortex beam in the focal plane. From the results, the magnitude and sign of the topological charge can be determined simultaneously from the phase distribution of the coherence singularities. Our results can find application in information transmission.

A novel non-iterative phase retrieval method is proposed and demonstrated with a
proof-of-principle experiment. The method uses a fixed specially designed mask and through-focus intensity measurements. It is demonstrated that this method is robust to spatial partial coherence in the illumination, making it suitable for coherent diffractive imaging using spatially partially coherent light, as well as for coherence characterization.

The complete characterization of spatial coherence is extremely di cult because the mutual coherence function (MCF) is a complex-valued function of four independent Cartesian coordinates. This di culty limits the ability to control and to optimize the spatial coherence in a broad range of key applications. Here we propose an e cient and robust scheme for measuring the complete MCF of an arbitrary partially coherent beam using self-referencing holography, which does not require any prior knowledge or making any assumptions about the MCF. We further apply our method to lensless di ractive imaging, and experimentally demonstrate the reconstruction of a phase object under spatially partially coherent illumination. This application is particularly useful for imaging at short wavelengths, where the illumination sources lack spatial coherence and no high-quality imaging optics are available.