Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask
Sander Konijnenberg (TU Delft - ImPhys/Optics)
Xingyuan Lu (Soochow University)
Leixin Liu (Soochow University)
Wim Coene (TU Delft - ImPhys/Optics, ASML)
Chengliang Zhao (Soochow University)
Paul Urbach (TU Delft - ImPhys/Optics)
More Info
expand_more
Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.
Abstract
A novel non-iterative phase retrieval method is proposed and demonstrated with a
proof-of-principle experiment. The method uses a fixed specially designed mask and through-focus intensity measurements. It is demonstrated that this method is robust to spatial partial coherence in the illumination, making it suitable for coherent diffractive imaging using spatially partially coherent light, as well as for coherence characterization.