Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask
A.P. Konijnenberg (TU Delft - ImPhys/Optics)
Xingyuan Lu (Soochow University)
Leixin Liu (Soochow University)
Wim M.J. Coene (TU Delft - ImPhys/Optics, ASML)
C.L. Zhao (Soochow University)
H. Paul Urbach (TU Delft - ImPhys/Optics)
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Abstract
A novel non-iterative phase retrieval method is proposed and demonstrated with a
proof-of-principle experiment. The method uses a fixed specially designed mask and through-focus intensity measurements. It is demonstrated that this method is robust to spatial partial coherence in the illumination, making it suitable for coherent diffractive imaging using spatially partially coherent light, as well as for coherence characterization.