Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask

Journal Article (2018)
Author(s)

A.P. Konijnenberg (TU Delft - ImPhys/Optics)

Xingyuan Lu (Soochow University)

Leixin Liu (Soochow University)

Wim M.J. Coene (TU Delft - ImPhys/Optics, ASML)

C.L. Zhao (Soochow University)

H. Paul Urbach (TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
Copyright
© 2018 A.P. Konijnenberg, Xingyuan Lu, Leixin Liu, W.M.J.M. Coene, C.L. Zhao, Paul Urbach
DOI related publication
https://doi.org/10.1364/OE.26.009332
More Info
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Publication Year
2018
Language
English
Copyright
© 2018 A.P. Konijnenberg, Xingyuan Lu, Leixin Liu, W.M.J.M. Coene, C.L. Zhao, Paul Urbach
Research Group
ImPhys/Optics
Issue number
7
Volume number
26
Pages (from-to)
9332 - 9343
Reuse Rights

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Abstract

A novel non-iterative phase retrieval method is proposed and demonstrated with a
proof-of-principle experiment. The method uses a fixed specially designed mask and through-focus intensity measurements. It is demonstrated that this method is robust to spatial partial coherence in the illumination, making it suitable for coherent diffractive imaging using spatially partially coherent light, as well as for coherence characterization.

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