Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1

Doctoral thesis (2017)

Authors

Y. Ren ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
Copyright: © 2017 Y. Ren
DOI: https://doi.org/10.4233/uuid:e25ff43d-b8ae-4b6c-9bc9-d10768c4ab11
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Published Date

2017

Language

English

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Research Group

ImPhys/Charged Particle Optics

Abstract

The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imaging system. The major conclusions, key results and some suggestions for future improvements are highlighted in this chapter.