Print Email Facebook Twitter Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl2 Title Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl2 Author Carlstrom, C.F. Van Der Heijden, R. Kok, A.M. Van der Heijden, R.W. Karouta, F. Van Der Tol, J.J.G.M. Nötzel, R. Van Veldhoven, P.J. Salemink, H.W.M. Date 2005 To reference this document use: http://resolver.tudelft.nl/uuid:fac329e2-82ca-42a0-ac4b-3ee99512c403 Source 2005 International Conference on Indium Phosphide and Related Materials Part of collection Institutional Repository Document type conference paper Rights (c) 2005 Carlstrom, C.F.; Van Der Heijden, R.; Kok, A.M.; Van der Heijden, R.W.; Karouta, F.; Van Der Tol, J.J.G.M.; NÖtzel, R.; Van Veldhoven, P.J.; Salemink, H.W.M. Files PDF 200501.pdf 926.72 KB Close viewer /islandora/object/uuid:fac329e2-82ca-42a0-ac4b-3ee99512c403/datastream/OBJ/view