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Zoumpouidis, T. (author), Wang, L. (author), Bartek, M. (author), Jansen, K.M.B. (author), Ernst, L.J. (author)Our progress in developing technology modules for deformable single-crystalline-silicon electronics is presented in this contribution. Additional deformability/reliability is accomplished by modifications of the previously reported ultra-thin and flexible CIRCONFLEX technology (1). The flexibility is added in the last steps of the process flow...journal article 2007
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- Jansen, K.M.B. (author), Wang, L.G. (author), Ernst, L.J. (author), Zhang, G.Q. (author), Bressers, H.J.L. (author) journal article 2004