- document
-
Rocha, L.A. (author), Dias, R.A. (author), Cretu, E. (author), Mol, L. (author), Wolffenbuttel, R.F. (author)This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operation, with an estimation of process-induced...journal article 2011
- document
-
Mol, L. (author), Rocha, L.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author)This paper provides experimental validation of the predictions by two recent models for squeezed film damping in the free molecule regime. Measurements were carried out using a parallel-plate microstructure with a 2.29 ?m gap operated at pressures from 105 to 101 Pa (corresponding to Knudsen numbers from 0.03 to 300). Experiments are in good...journal article 2009
- document
-
Mol, L. (author), Rocha, L.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author)Squeeze-film damping is highly inadequate in low-pressure systems or in systems where air pressure and/or gap dimensions are poorly defined. Input shaping has been used to circumvent the oscillations typically associated with under-damped mass-spring-damper systems and drastically decrease the settling time. The proposed method does not rely on...journal article 2009
- document
-
Rocha, L.A. (author), Mol, L. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author), Machado da Silva, J. (author)A test technique for capacitive MEMS accelerometers and electrostatic microactuators, based on the measurement of pull-in voltages and resonance frequency, is described. Using this combination of measurements, one can estimate process-induced variations in the device layout dimensions as well as deviations from nominal value in material...journal article 2008
- document
- Mol, L. (author), Rocha, L.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author) journal article 2008
- document
- De Graaf, G. (author), Mol, L. (author), Rocha, L.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author) journal article 2005