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Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
Fast step-response settling of micro electrostatic actuators operated at low air pressure using input shaping
A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization
Read-out calibration of a SOI capacitive transducer using the pull-in voltage
Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement
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