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Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers
25.8 Gb/s Submillimeter Optical Data Link Module for Smart Catheters
Cavity‐box soi: Advanced silicon substrate with pre‐patterned box for monolithic mems fabrication
Embedded High-Density Trench Capacitors for Smart Catheters
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