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Saddle-point construction in the design of lithographic objectives, part 1: Method
Saddle-point construction in the design of lithographic objectives, part 2: Application
Optimization of extreme ultraviolet mirror systems comprising high-order aspheric surfaces
Practical guide to saddle-point construction in lens design
Designing lithographic objectives by constructing saddle points
Saddle points in the merit function landscape of lithographic objectives
The network structure of the merit function space of EUV mirror systems
Avoiding unstable regions in the design space of EUV mirror systems comprising high-order aspheric surfaces
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