- document
-
Pandraud, G. (author), Pham, H.T.M. (author), Pakula, L.S. (author), Sarro, P.M. (author), French, P.J. (author)Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with a oxide isolation layer. Using post deposition annealing it is possible to achieve low Polarization-Dependent Loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. Those waveguides have been successfully...conference paper 2005