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2 July 2024
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Thermodynamic Calculations on the Chemical Vapor-Deposition of Silicon-Nitride and Silicon from Silane and Chlorinated Silanes
Laser Synthesis of Low-Agglomerated Submicrometer Silicon-Nitride Powders from Chlorinated Silanes
Determination of particle aggregation in ultrafine silicon nitride powders
Microstructure of laser-deposited silicon nitride powders
Chemical vapor precipitation of silicon nitride powders with a tunable carbon dioxide laser
Laser Chemical Vapor Precipitation of Submicrometer Silicon and Silicon-Nitride Powders from Chlorinated Silanes
Laser Cvp of Ultrafine Ceramic Powders of Si and Si3n4 - a Study of the Flow Pattern of the Laser Flame
Laser excited synthesis of sub-micron powders
Laser vapor-phase synthesis of submicron silicon and silicon nitride powders from chlorinated silanes
Laser vapor phase synthesis of submicron silicon and silicon nitride powders from halogenated silanes
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