Limodio, G. (author), Yang, G. (author), De Groot, Yvar (author), Procel, Paul (author), Mazzarella, L. (author), Weber, Arthur W. (author), Isabella, O. (author), Zeman, M. (author) In this work, we develop SiO<sub>x</sub>/poly-Si carrier-selective contacts grown by low-pressure chemical vapor deposition and boron or phosphorus doped by ion implantation. We investigate their passivation properties on symmetric structures while varying the thickness of poly-Si in a wide range (20-250 nm). Dose and energy of implantation...
journal article 2020