Babaei Gavan, K. (author), Van der Drift, E.W.J.M. (author), Venstra, W.J. (author), Zuiddam, M.R. (author), Van der Zant, H.S.J. (author) We present a systematic investigation of the dynamic properties of silicon nitride cantilevers in air. The thermal noise spectra of cantilevers have been measured using a home-made optical deflection setup. Torsional and flexural resonances up to the seventh mode are observed. The dependence of resonance frequencies on the dimensions and mode...
journal article 2009
