A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100g/h/surdHz Noise i Floor and Zero Stability of pm 0.35mg/h

Flow sensors with high resolution (<200g/h/surdHz) and low offset drift (<pm 0.4mg/h) are essential in many microfluidic applications, such as flow cytometry and biological/chemical assays. Although thermal flow sensors can meet these specifications [1], [2], they measure flow velocity, so their calibration is fluid specific. Coriolis...

5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability

Precision flow sensors are widely used in the pharmaceutical, food, and semiconductor industries to measure small amounts (<1 gram/hour) of liquids and gases. MEMS thermal flow sensors currently achieve state-of-the-art performance in terms of resolution, size, and power consumption [1, 3]. However, they only measure volumetric flow, and...