A 200μW Eddy Current Displacement Sensor with 6.7nm_RMS Resolution

This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43μm range...

A 0.12mm² Wien-Bridge Temperature Sensor with 0.1°C (3σ) Inaccuracy from -40°C to 180°C

Resistor-based temperature sensors can achieve much higher resolution and energy efficiency than conventional BJT-based sensors [1], but they typically occupy more area (> 0.25 mm ² ) and have lower operating temperatures (le 125 {circ} {C}) [2]-[4]. This work describes a 0.12mm ² resistor-based sensor that uses a...