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Maduro, L.A. (author), de Boer, Charles (author), Zuiddam, M.R. (author), Memisevic, E. (author), Conesa Boj, S. (author)We report on the fabrication of molybdenum (Mo) nanopillar (NP) arrays with NP diameters down to 75 nm by means of deep-reactive ion etching at cryogenic temperatures. A variable-thickness Mo metal layer sputtered onto a Si<sub>3</sub>N<sub>4</sub>/Si substrate makes possible NPs with different lengths in a controllable manner. We demonstrate...journal article 2021