A 200-μW Interface for High-Resolution Eddy-Current Displacement Sensors

This article presents a low-power eddy-current sensor interface for touch applications. It is based on a bang-bang digital phase-locked loop (DPLL) that converts the displacement of a metal target into digital information. The PLL consists of a digitally controlled oscillator (DCO) built around a sensing coil and a capacitive DAC, a...

A 200μW Eddy Current Displacement Sensor with 6.7nm_RMS Resolution

This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43μm range...