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Mohan, Adithya Keshav (author)
Ceramics are being explored as an alternative material by ASML to replace their stainless steel 316L (SS316L) reticle masking blades. Ceramics offer distinct advantages over stainless steel in the semiconductor industry. While stainless steel exhibits good mechanical strength, ceramics excel in electrical insulation and thermal conductivity,...
master thesis 2023
document
RAMACHANDRAN, NAAGARAJAN (author)
Pressurized liquid Tin finds application in the generation of Extreme Ultra-Violet light for semiconductor lithography. In order to improve the throughput of the lithography systems, tin must be pressurized to higher levels, and in turn, new pressurization methods are needed.<br/><br/>A phase change tin pump is an innovative system that...
master thesis 2023
document
van Loo, N. (author)
The development of quantum computers is perhaps one of the most exciting innovations of our time. The most investigated quantum computers, however, suffer from the fact that quantum information is lost due to interaction between the quantum bits and their environment. As a radically different approach, it has been proposed that one can instead...
doctoral thesis 2023
document
Ajroemjan, Wahhe (author)
The packaging of a microchip affects its size, performance and cost. With advanced packaging, more efficient and smaller microchips can be produced. For this, advanced packaging stepper systems are used, which are lithography machines with a highly optimized projection lens system, that use a powerful light source. The projection lens system for...
master thesis 2021
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Agarwal, Girish (author), Allen, Roland E. (author), Bezděková, Iva (author), Boyd, Robert W. (author), Chen, Goong (author), Hanson, R. (author), Hawthorne, Dean L. (author), Hemmer, Philip (author), Kim, Moochan B. (author), Kocharovskaya, Olga (author), Lee, D. (author), Lidström, Sebastian K. (author), Lidström, Suzy (author), Losert, Harald (author), Maier, Helmut (author), Neuberger, John W. (author), Padgett, Miles J. (author), Raizen, Mark (author), Rajendran, Surjeet (author), Rasel, Ernst (author), Schleich, Wolfgang P. (author), Scully, Marlan O. (author), Shchedrin, Gavriil (author), Shvets, Gennady (author), Sokolov, Alexei (author), Svidzinsky, Anatoly (author), Walsworth, Ronald L. (author), Weiss, Rainer (author), Wilczek, Frank (author), Willner, Alan E. (author), Yablonovich, Eli (author), Zheludev, Nikolay (author)
The Winter Colloquium on the Physics of Quantum Electronics (PQE) has been a seminal force in quantum optics and related areas since 1971. It is rather mind-boggling to recognize how the concepts presented at these conferences have transformed scientific understanding and human society. In January 2017, the participants of PQE were asked to...
journal article 2018
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Ushakova, K. (author), Van den Berg, Q.Y. (author), Pereira, S.F. (author), Urbach, H.P. (author)
Spot size reduction is demonstrated by printing focused spots from amplitude-modulated radially polarized light at the wavelength ? = 405 nm on a photoresist. Amplitude modulation is realized by ring illumination and by application of an optimized amplitude distribution function. Amplitude modulation is implemented via spatial light modulator,...
journal article 2015
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Kant, N. (author)
In this thesis a model-based filter is developed to improve the estimates of the lens aberrations.
master thesis 2015
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Hari, S. (author), Hagen, C.W. (author), Verduin, T. (author), Kruit, P. (author)
In a first study to analyze the feasibility of electron beam-induced deposition (EBID) for creating certain patterns in advanced lithography, line patterns were fabricated on silicon wafers using EBID. The growth conditions were such that the growth rate is fully determined by the electron flux (the current limited growth regime). It is...
journal article 2014
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De Buck, P.B.A. (author)
Lens set-up using PARIS (Parallel ILIAS) Lens set-up State of the art coarse lithographic lens set-up consists of ILIAS, FOCAL and DISTO tests. A proposal is done to phenomenologically represent gain and offset in each of the tests. A data-driven method to construct the model is introduced. This model can be related to a PARIS-based set-up test....
master thesis 2014
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Graef, M.W.M. (author)
The concept “More than Moore” was introduced in the 2005 edition of the International Technology Roadmap for Semiconductors (ITRS), with the purpose to describe technology features that do not fit the miniaturization trends as implied by Moore's Law. These features typically enable non?digital functionalities, such as wireless communication,...
conference paper 2011
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Maas, D. (author), Van Veldhoven, E. (author), Chen, P. (author), Sidorkin, V. (author), Salemink, H. (author), Van der Drift, E. (author), Alkemade, P. (author)
The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe [1,2]. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well...
conference paper 2009
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Marinescu, O. (author), Bociort, F. (author)
journal article 2008
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Marinescu, O. (author), Bociort, F. (author)
journal article 2008
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Nugrowati, A.M. (author)
In this thesis, we present applications in optics involving the diffraction theory of light for two advanced technologies. We have used a rigorous vectorial diffraction method to model: (i) the imaging of mask structures in extreme ultraviolet lithography, and (ii) ultrashort pulse propagation through small apertures. We have explained the...
doctoral thesis 2008
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Marinescu, O. (author), Bociort, F. (author)
The merit function space of mirror system for extreme ultraviolet (EUV) lithography is studied. Local minima situated in the multidimensional optical merit function space are connected via links that contain saddle points and form a network. We present networks for EUV lithographic objective designs and discuss how these networks change when...
journal article 2007
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Bociort, F. (author), Van Turnhout, M. (author)
In present-day optical system design, it is tacitly assumed that local minima are points in the merit function landscapewithout relationships between them. We will show however that there is a certain degree of order in the design landscapeand that this order is best observed when we change the dimensionality of the optimization problem and when...
conference paper 2006
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Marinescu, O. (author), Bociort, F. (author)
Optical designers often insert or split lenses in existing designs. Here, we present, with examples from Deep and Extreme UV lithography, an alternative method that consists of constructing saddle points and obtaining new local minima from them. The method is remarkable simple and can therefore be easily integrated with the traditional design...
conference paper 2006
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Serebriakov, A.G. (author)
This thesis has been devoted to two main subjects: the compensation of birefringence induced by spatial dispersion (BISD) in Deep-UV lithographic objectives and the optimization of optical systems in general.
doctoral thesis 2005
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Marinescu, O. (author), Bociort, F. (author)
The multidimensional merit function space of complex optical systems contains a large number of local minima that are connected via links that contain saddle points. In this work, we illustrate a method to construct such saddle points with examples of deep UV objectives and extreme UV mirror systems for lithography. The central idea of our...
conference paper 2005
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Bociort, F. (author), Van Turnhout, M. (author)
Finding multiple local minima in the merit function landscape of optical system optimization is a difficult task, especially for complex designs that have a large number of variables. We discuss here a method that enables a rapid generation of new local minima for optical systems of arbitrary complexity. We have recently shown that saddle points...
conference paper 2005
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